piezoD is a tool for optimizing the performance of piezoresistive cantilevers. It is currently written in object oriented Matlab. piezoD is designed to make it fast and easy to design piezoresistive cantilevers.

features

• materials

  • p-type and n-type single crystal silicon cantilevers

• performance model

  • noise: 1/f, johnson, amplifier

  • doping methods: epitaxy, diffusion

• constraints available

  • cantilever design: dimensions, bias voltage, doping timetemperatureconcentration

  • computed: power dissipation, resonant frequency (vacuum or fluid), resistance, spring constant

• optimization targets

  • force resolution in a user specified bandwidth

  • displacement resolution in a user specified bandwidth

license

Copyright© 2009 Joey Doll and Stanford Microsystems Lab

piezoD is free software; you can redistribute it and/or modify it under the terms of the GNU General Public License as published by the Free Software Foundation; either version 3 of the License, or (at your option) any later version.

piezoD is distributed in the hope that it will be useful, but WITHOUT ANY WARRANTY; without even the implied warranty of MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the GNU General Public License for more details