Course Information by Type
Design
Stanford University
EE321: MEMS Design
ME342: MEMS Laboratory
Massachusetts Institute of Technology
EE/CS 6.777J: Design and Fabrication of MEM Devices
Univeristy of California, Irvine
MAE249 / ECE 249: Micro-sensors and Actuators
MAE249 / ECE 249: Micro-sensors and Actuators
University of California, Los Angeles
EE M150: Introduction to Micromachining and MEMS EE M250B / MAE M282 / BME
M250B: MEMS Physics and Design
University of Central Florida
EML5290: Introduction of MEMS and Microfabrication
EML6296: MEMS Mechanism and Design
University of South Florida
EEL5525: Principles of MEMS Transducers
University of Maryland
ENEE 605: Design and Fabrication of MEMS
University of Washington
EE502 / ME504 / MSE504: Introduction to Microelectromechanical Systems (MEMS)
Fabrication Lecture
Univeristy of California, Irvine
MAE252: Fundamentals of Microfabrication
University of California, Los Angeles
EE M150: Introduction to Micromachining and MEMS
EE M250A / MAE M280 / BME M250A: MEMS Fabrication
University of Wisconsin, Madison
ME601 / ME964: Fundamentals of Microfabrication & Non-Convnetional
Manufacturing
Fabrication Lab
Columbia University
MECE E4212: MEMS
Stanford University
ME342: MEMS Laboratory
University of California, Los Angeles
EE M150: Introduction to Micromachining and MEMS
EE M150L: Introduction to Micromachining and MEMS Lab
University of Louisville
ECE543: Fundamentals of Microfabrication and MEMS
University of Maryland
ENEE 605: Design and Fabrication of MEMS
ENEE 719F Fabrication and Testing of MEMS
University of San Francisco
EEL4935/6935 / ECH4391/6391: Design/Fabrication of MEMS
University of Washington
EE527: Microfabrication Laboratory Techniques
Physics & Science
University of Alabama
ECE693: Foundations of MEMS Technology
University of Wisconsin, Madison
EMA506: Advanced Mechanics of Materials
EMA601: Micro- and Nanoscale Mechanics
Special & Other
Stanford University
ME258: Heat Transfer in Microdevices
ME457: Fluid FLow in Microdevices
University of Alabama
ECE493/593: Dynamics and Control of MEMS
University of Arizona
AME586: Microfluidics
Univeristy of California, Berkeley
BioE121: Introduction to Micro and Nanobiotechnology: BioMEMS
Univeristy of California, Irvine
BME261: Biomed Microdevices
CBEMS166: Science of Nanoscale Materials and Devices
MAE253: Biomems
University of California, Los Angeles
MAE281: Microsciences
MAE284: Sensors, Actuators and Signal Processing
University of Florida
EGM6934: Microfluidics and BioMEMS
University of Illinois, Urbana-Champaign
ME598: Mechanics of MEMS
University of San Francisco
EEL4935/6935 / ECH4391/6391: Design/Fabrication of MEMS
University of Southern California
BME431: Fundamentals of Biomedical Microdevices
University of Wisconsin, Madison
BME601: Intro to Interfacing Biology and Technology on the Microscale
