	MEMS Education Workshop 2005


		Course Information by School A \| B \| C \| D \| E \| F \| G \| H \| I \| J \| K \| L \| M \| N \| O \| P \| Q \| R \| S \| T \| U \| V \| W \| X \| Y \| Z A Arizona State University EEE 598J ST: RF MEMS Current Syllabus C Columbia University MECE E4212: MEMS Syllabus Hands-On MEMS Cornell University ECE432: Introduction to MEMS Syllabus E Ecole Polytechnique de Montreal PSH4310: Microfabrication Current webpage PSH4310: Microsystems Current webpage J Johns Hopkins University 520 / 530 / 580.495: Microfabrication Laboratory Current webpage 530 / 580.672: BioSensing and BioMEMS Current webpage M Massachusetts Institute of Technology 2.76 / 2.760: Multi-scale System Design and Manufacturing Current webpage BE .481J / 7.86J / MAS .866: Fundamental Limit of Biological Measurement Current webpage EE/CS 6.777J: Design and Fabrication of MEM Devices Current webpage Syllabus Schedule Overview Project Michigan State University ECE477: IC/MEMS Fabrication Current webpage ECE870: Introduction to MEMS Current webpage ECE871: Microsystems Fabrication Current webpage Michigan Technical University ENG2950/2960/3950/3960/4950/4960: Integrated Microsystems Current webpage N Northeastern University ECE3626: Integrated Circuit Fabrication Current webpage ECE1406: Integrated Circuit Fabrication Current webpage ECE G244 / MTM G260: Microelectromechanical Systems (MEMS) Current webpage S Stanford University EE312: Solid-State Sensors and Actuators Current webpage EE321: MEMS Design Current webpage Syllabus ME258: Heat Transfer in Microdevices Notes / syllabus ME342: MEMS Laboratory Current webpage Syllabus Laboratory Project ME457: Fluid FLow in Microdevices Syllabus U University of Alabama ECE493/593: Dynamics and Control of MEMS Syllabus ECE693: Foundations of MEMS Technology Syllabus University of Arizona AME586: Microfluidics Syllabus Description University of Central Florida EML5290: Introduction of MEMS and Microfabrication Syllabus EML6296: MEMS Mechanism and Design Syllabus Univeristy of California, Berkeley EE143: Microfabrication Technology Current webpage Syllabus Fabrication Process Flow MEMS Process Flow Lab Report EECS 245 Introduction to MEMS Design Current webpage (Fall 2002) (Fall 2003) Syllabus Reader Project Description Midterm Midterm review EE290B / EE298A: Introduction to Electron Beam Lithography and Nano-fabrication Technology Current webpage BioE121: Introduction to Micro and Nanobiotechnology: BioMEMS Current webpage Univeristy of California, Irvine BME261: Biomed Microdevices Current webpage CBEMS166: Science of Nanoscale Materials and Devices Current webpage ECE217C: Nanotechnology Current webpage EECS179: Introduction to MEMS Current webpage MAE247 / EECS 247: Microsystems Design Current webpage Syllabus MAE249 / ECE 249: Micro-sensors and Actuators Current webpage Syllabus MAE252: Fundamentals of Microfabrication Current webpage Syllabus MAE253: Biomems Current webpage Nanotechnology: Past and Future Current webpage University of California, Los Angeles EE M150: Introduction to Micromachining and MEMS Current webpage Syllabus EE M150L: Introduction to Micromachining and MEMS Lab Current webpage Syllabus EE M250A / MAE M280 / BME M250A: MEMS Fabrication Current webpage Syllabus EE M250B / MAE M282 / BME M250B: MEMS Physics and Design Current webpage Syllabus MAE281: Microsciences Syllabus MAE284: Sensors, Actuators and Signal Processing Syllabus University of Colorado, Boulder MCEN 5636-001: Microelectromechanical Systems (MEMS) Current webpage MCEN 5248-001: MEMS-II Current webpage MCEN 4228-002/5228-003 / MCDB 4100-002/6440-002: Molecular Biology and Micro/Nano-Scale Engineering Current webpage University of Florida EEL5525: Principles of MEMS Transducers Syllabus University of Illinois, Urbana-Champaign ME598: Mechanics of MEMS Overview University of Louisville ECE543: Fundamentals of Microfabrication and MEMS Syllabus University of Maryland ENEE 605: Design and Fabrication of MEMS Current Webpage ENEE 719F Fabrication and Testing of MEMS Current Webpage University of San Francisco EEL4935/6935 / ECH4391/6391: Design/Fabrication of MEMS Current Webpage Syllabus Course outline University of Southern California BME431: Fundamentals of Biomedical Microdevices Syllabus University of South Florida EEL5525: Principles of MEMS Transducers Syllabus EEL 6935: Special Topics--Advanced Microsystem Design and Manufacturing Current webpage University of Washington EE502 / ME504 / MSE504: Introduction to Microelectromechanical Systems (MEMS) Syllabus Course info EE527: Microfabrication Laboratory Techniques Syllabus Course info University of Wisconsin, Madison BME601: Intro to Interfacing Biology and Technology on the Microscale Syllabus ECE601: Special Topics in Electrical and Computer Engineering - Introduction to MicroElectroMechanical Systems Current webpage ME601 / ME964: Fundamentals of Microfabrication & Non-Convnetional Manufacturing Syllabus EMA506: Advanced Mechanics of Materials Syllabus Design Project 1 Design Project 2 EMA601: Micro- and Nanoscale Mechanics Schedule

		Sponsored by the National Science Foundation and NASA Goddard Space Flight Center (GSFC)